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In modern semiconductor manufacturing facilities, metrology capacity is becoming limited because of the high equipment cost. This paper studies the problem of optimally assigning the capacity of multiple identical metrology tools in order to minimize the risk of defective wafers on heterogeneous production machines. We assume that the output of each production machine is assigned to only one metrology...
Scheduling optimization in semiconductor manufacturing is always a crucial task in production performance indicators such as machine utilization, cycle time and delivery times. With the increasing complexity of fabrication techniques and scales, scheduling and control activities are inevitably confronted with each other and shall be integrated correspondingly. In particular scheduling and control...
As modern manufacturing technology progresses, measurement tools become scarce resources since more and longer control operations are required. It thus becomes critical to decide whether a lot should be measured or not in order to get as much information as possible on production tools or processes, and to avoid ineffective measurements. To minimize risks and optimize measurement capacity, a smart...
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