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2010 International Electron Devices Meeting > 7.5.1 - 7.5.4
Journal of Microelectromechanical Systems > 2010 > 19 > 3 > 516 - 525
2010 International Electron Devices Meeting > 7.5.1 - 7.5.4
Journal of Microelectromechanical Systems > 2010 > 19 > 3 > 516 - 525