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The amorphous soft magnetic alloys were produced by magnetron sputtering of Fe-8at%Zr target in Ar and Ar+10%N 2 atmospheres as films 1.5-2.5μm thick. X-ray diffraction analysis showed that annealing of the films resulted in formation of BCC Fe-based phase and additionally Fe 2 Zr in the Fe-Zr films. Amorphous phase in the Fe-Zr-N films is more thermostable in comparison with that...
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