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A dielectric-free DC-contact RF microelectromechanical system (MEMS) switch is designed and tested at room temperature and cryogenic temperatures. The switch demonstrates a 1-?? contact resistance and 2 fF up-state capacitance at room temperature, with an insertion-loss less than 0.4 dB up to 50 GHz and less than 0.9 dB up to 75 GHz. The isolation is better than 24 dB up to 50 GHz and 18 dB up to...
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