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We study the surface topography and swelling of GaN irradiated at room temperature with 1.3keV/amu F, P, PF 2 , and PF 4 ions. These irradiation conditions reveal the effect of the collision cascade density on ion-induced swelling and roughening of the GaN surface. Results show that, for F and P ions that create dilute collision cascades, swelling dominates erosion. In the case of...
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