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Journal of Microelectromechanical Systems > 2011 > 20 > 1 > 193 - 203
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 570 - 576
Journal of Microelectromechanical Systems > 2008 > 17 > 6 > 1460 - 1467
Journal of Microelectromechanical Systems > 2011 > 20 > 1 > 193 - 203
Journal of Microelectromechanical Systems > 2009 > 18 > 3 > 570 - 576
Journal of Microelectromechanical Systems > 2008 > 17 > 6 > 1460 - 1467