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Journal of Microelectromechanical Systems > 2013 > 22 > 1 > 13 - 15
Journal of Microelectromechanical Systems > 2011 > 20 > 4 > 785 - 787
Journal of Microelectromechanical Systems > 2013 > 22 > 1 > 13 - 15
Journal of Microelectromechanical Systems > 2011 > 20 > 4 > 785 - 787