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Journal of Microelectromechanical Systems > 2007 > 16 > 3 > 639 - 649
Journal of Microelectromechanical Systems > 2006 > 15 > 6 > 1644 - 1655
Journal of Microelectromechanical Systems > 2007 > 16 > 3 > 639 - 649
Journal of Microelectromechanical Systems > 2006 > 15 > 6 > 1644 - 1655