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This paper presents the design and characterization of compact high-power RF microelectromechanical system single-pole single-throw (SPST) and single-pole four-throw (SP4T) metal-contact switches. The SPST design results in a contact force of 1.9–2.8 mN at 80–90 V distributed over eight contacts and using four independent quadrants for actuation. The SP4T is a derivative of the SPST and results in...
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