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In this study, structural and optical properties of ZnO:Dy, ZnO:Yb, and ZnO:(Dy,Yb) films are investigated. Epitaxial ZnO films are grown by atomic layer deposition at 300 °C and implanted with Yb and Dy ions to the fluence of 5 × 1014 cm−2. The effects of Dy and Yb implantation, Dy/Yb coimplantation, and postgrowth annealing are studied by channeling Rutherford backscattering spectrometry (RBS/c)...
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