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The aims of this study are to estimate the effect of geometrical dimensions on stiffness, stress and strain of flexible MEMS structures at pull-in and stiction positions. Microcantilevers and microbridges are often used as flexible mechanical elements in microsystems for sensing and actuation functions. Analytical models for stiffness, stress and strain of flexible microcomponents as microcantilevers...
The basic structures of MEMS sensing elements are mechanical parts like microbridge, microcantilever and micromembrane. One way of characterizing the performance of these flexible microcomponents is by defining their relevant stiffness. Stiffness is a fundamental criterion of elastically-deformable mechanical flexible microcomponents. The aim of this paper is to determine the experimental and theoretical...
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