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This paper reports on the investigation of 1 μm thick films of 20% Scandium-doped Aluminum Nitride (ScAlN) for the making of piezoelectric MEMS laterally vibrating resonators (LVRs). The ScAlN films, which can be sputter-deposited such as undoped Aluminum Nitride (AlN) films, were used to demonstrate high performance resonators. These devices showed quality factor (Qs) in excess of 1000 in air centered...
This paper introduces the use of artificial neural networks (ANNs) as a method to guide the design of high-performance MEMS resonators and applies it to the prediction of spurious modes (SMs) in the proximity of the series resonance of aluminum nitride (AlN) contour-mode MEMS resonators (CMRs). ANN enables both fast and accurate prediction of spurious modes, hence facilitating the MEMS designer in...
Temperature stability is critical for commercial oscillators and many methods have been explored such as: a) constant-resistance-based control methods; b) DTCMs with look-up tables; c) phase-lock-loop based control methods. Whereas exemplary results have been attained with these techniques, to be effective they require: a) accurate knowledge of the source of temperature fluctuations; (b) the use of...
RF filtering technologies based on piezoelectric MEMS resonators have been successfully developed and commercialized in the past decade thanks to their size and outstanding performance. The challenge to enhance filter's performance in terms of lower insertion losses and wider bandwidth still makes for an active research topic, especially spurring the interest for new classes of materials such as doped-AlN...
Spurious modes (SMs) result in in-band ripples and degrade the out-of-band rejection of filters, thus impeding the synthesis of high performance filters with MEMS resonators. Therefore, the ability to predict the presence of SMs in specific resonator geometries is highly desired and different techniques have been explored such as: 1-D/2-D analytic models, and 2-D/3-D finite element methods (FEM)....
This paper reports on the demonstration of an effective use of an artificial neural network (ANN) algorithm for the implementation of a digital temperature compensation method (DTCM) for aluminum nitride (AlN) MEMS resonators. This method resulted in an improved frequency-temperature stability (14 ppm from −40 °C to +80 °C with respect to 100 ppm when using a resistive-feedback control circuit), while...
This paper reports on the design and demonstration of a miniaturized and integrated heater that enables low power ovenization and temperature stability for piezoelectric MEMS resonators. The low power ovenization is implemented by an integrated symmetric oven platform and high thermal-resistance supporting structures. The temperature compensation circuit is formed by a modified Wheatstone bridge with...
This paper reports the demonstration of an array of piezoelectric/magnetostrictive micro electromechanical system (MEMS) magnetic resonant sensors (PM-MRS) for multi-axis magnetic field (H-field) detection. An array of 43 MHz aluminum nitride (AlN) piezoelectric resonators vibrating along different in-plane directions (θ) but coated with a magnetostrictive layer (Fe65.6Co9.4B25) with the same easy...
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