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We demonstrate low-loss mid infrared photonic integrated components fabricated on a Ge-rich Si1−xGex platform. These devices show broadband operation over a wavelength range of at least from λ ≈ 5.1 μm to λ ≈ 8.6 μm, and comprise waveguides, multimode interference couplers and Mach-Zehnder interferometers.
A promising design for novel mid-infrared integrated Fabry-Perot cavities based on Bragg grating is presented. These cavities show good potential for several applications, including sensing, optical metrology, thermal imaging or free-space communications.
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