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We demonstrate direct modulation of a widely tunable microelectromechanical system (MEMS) vertical-cavity surface-emitting laser (VCSEL). The wavelength tuning is realized with electrothermal actuation of a SiO $_x$/SiN$_y$-based MEMS distributed Bragg reflector (DBR). The DBR is deposited in a low-temperature plasma-enhanced chemical vapor deposition chamber on a InP-based half-VCSEL by means of...
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