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This paper presents a method for modeling and analyzing the circumferential uniformity of MOCVD showerhead hole arrangement. The coordinate expressions of MOCVD showerhead hole are derived from the initial position of the radial hole on the helix curve. Through rotating the strip observation window around the center of the showerhead face plate at an equal angle, a data set is obtained by computing...
The calibration is very important to improve the accuracy of the parallel mechanism. This paper proposed a new calibration approach for the parallel mechanism based on the direct kinematics model and the genetic algorithm. The proposed calibration approach avoids the measurement of the absolute position/posture of the moving platform in the calibration. Firstly, the ideal kinematics model, as well...
A kind of serial-parallel hybrid polishing machine tool based on the elastic polishing theory is developed and applied to finish mould surface with using bound abrasives. It mainly consists of parallel mechanism of three dimensional moving platform, serial rotational mechanism of two degrees of freedom and the elastic polishing tool system. The active compliant control and passive conformity of polishing...
Application of online system identification based on improved quantum-behaved particle swarm optimization is studied in this paper. QPSO algorithm combined with the single neuron can improve the local search capabilities and identification accuracy. Then the improved QPSO is applied to online identify parameters of a system described by differential equations and compared with the improved particle...
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