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A Pyrex nanochannel system with embedded transverse nanoelectrodes was designed and fabricated by MEMS based microfabrication and focused ion beam (FIB) nanolithography. The microchannels and microelectrodes in the system were patterned on a Cr/Au coated Pyrex wafer using conventional photolithography while the nanoelectrodes (100 nm wide and 50 nm thick) and the nanochannels (500 nm to 1 μm wide...
A Pyrex nanochannel device was fabricated using AFM nanolithography in conjunction with MEMS-based microfabrication. The fabrication process began with the patterning of microchannels on a Pyrex substrate using photolithography and wet etching. AFM nanolithography was then performed to realize a nanochannel between the micro reservoirs. A diamond-coated AFM probe with a relatively large force constant...
A silicon nanochannel system with integrated transverse electrodes was designed and fabricated by combining MEMS microfabrication and AFM nanolithography. The fabrication process began with the patterning of microscale reservoirs and electrodes on an oxidized silicon chip using conventional MEMS techniques. A nanochannel, approximately 30µm long with a small semi-circular cross-sectional area of 20nm...
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