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Nanosecond scale pulsed high voltage discharges in air/fuel mixtures can generate radicals which in turn have been shown to improve combustion efficiency in gasoline fueled internal combustion engines. We are exploring the possibility to extend such transient plasma generation and expected radical species generation to the range of pressures encountered in compression-ignition (diesel) engines having...
This paper presents a method by using a compensative structure assisted to fabricate deep lateral single-crystal-silicon (SCS) blaze micro-grating at Inductively-Coupled-Plasma Reactive Ion Etch (ICP-RIE). Due to the high resolution of blaze micro-grating, it's hard to maintain the teeth structure of blaze micro-grating under deep silicon etch in ICP-RIE process. Here, the independent rectangular...
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