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Chlorine (Cl) doped ZnO thin films are grown using Pulsed Laser Deposition (PLD) to conduct a feasibility study for the possible application of this material as transparent conducting electrode (TCO) in transparent electrodes. Cl doped ZnO films are deposited on c-plane (0001) sapphire (Al 2 O 3 ) and glass substrates at 100 °C using two Cl doped ZnO targets with chlorine concentrations...
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