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E-beam inspection provides an alternative approach to brightfield inspection for detection of otherwise difficult to detect physical defects. Advantages of E-beam inspection include superior resolution, the ability to classify defects using patch images, automatic filtering of prior level defects, and beam conditions for material contrast. For extremely small defects, which are becoming more common...
E-beam inspection provides a complementary approach to brightfield inspection for detection of otherwise difficult to detect physical defects. Advantages of E-beam inspection include superior resolution, the ability to classify defects using patch images and automatic filtering of prior level defects. A key limitation, however, is throughput. Therefore brightfield inspection should always be used...
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