The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
In this paper, a micro vacuum pirani gauge made of single crystal silicon has been developed and its temperature and DC current response properties in different pressures were firstly studied detailedly. The resistance of it increases with the temperature exponentially. There is a current threshold resulting from the materials characteristics and the precision of the instrument at low pressure. And...
In this paper, a very simple micro vacuum pirani gauge made of single crystal silicon is presented. It was fabricated by standard bulk micromachining with only three masks. The high aspect ratio structure of the pirani gauge has large efficient gaseous heat transfer area, thus can increase the sensitivity of the pirani gauge. The dynamic range of the pirani gauge is 2 Pa to 400 Pa which should be...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.