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Titania–silica hybrid films with a thickness of 300 nm are fabricated by combining a sol–gel method with a spin-coating process from the acid-catalyzed organically modified silane solution of γ-glycidoxypropyltrimethoxysilane, methyltriethoxysilane and tetrapropylorthotitanate. The dielectric constants of the titania–silica hybrid films can be easily controlled by adjusting titanium content. Effects...
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