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This paper reports a high sensitive micro thermal conductivity detector (μTCD) with sandwich structure, which is composed of glass substrate, silicon-on-insulator (SOI) with micro channels and glass with micro channels. A suspended cross-mesh structure includes a Pt thermistor protected by two SiNx layers and a cross-mesh support made of top silicon of SOI, and it is released by deep reactive ion...
This paper reports a newly developed micro-fabricated gas chromatographic (μGC) column with embedded elliptic cylindrical posts (ECP) in a silicon-glass architecture, which has higher surface area and less quasi-zero velocity zone compared to the state of the art. By coating polydimethylsiloxane as the stationary phase, the 2 m and 4 m columns can separate methane and ethane with 0.66 and 1.02 resolution.
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