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Investigations of the use of patterned porous GaN underlayers to achieve elastic relaxation of lattice‐mismatched top layers such as InGaN and AlGaN are reviewed. Thereby, the degree of relaxation of the top layers increases with the porosity and associated decrease in mechanical hardness of the porous GaN underlayers as well as with decreasing pattern size and increase in thickness of the lattice‐mismatched...
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