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A new slip model derived by molecular dynamics has been used to investigate the ultra-thin gas-lubricated slider bearings beneath the three bushings of an electrostatic micromotor in micro-electro-mechanical systems (MEMS). Modified Reynolds equation is proposed based on the modified slip model. Analytical solutions for flow rate, pressure distribution, load carrying capacity and streamwise location...
Friction and wear are the most serious problems for micromotors in microelectromechanical systems (MEMS). In the paper, a linear-sliding wear model of the contact between the rotor bushing and the ground plane is presented to describe the wear and a corresponding simplified method is proposed to simulate the wearing process. The effects of geometry parameters, material properties and applied operating...
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