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The effects of pulsed DC (PDC) magnetron sputtering on the crystalline structure of the high mobility transparent conducting oxide (TCO), titanium-doped indium oxide (ITiO), are investigated. High mobility (μ >100 V -1 s -1 cm 2 ) ITiO films are deposited by PDC magnetron sputtering and compared to RF deposited films using optimized conditions. These high mobility ITiO films...
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