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The relationship between microscopic parameters and polymer charging caused by defocused electron beam irradiation is investigated using a dynamic scattering-transport model. The dynamic charging process of an irradiated polymer using a defocused 30keV electron beam is conducted. In this study, the space charge distribution with a 30keV non-penetrating e-beam is negative and supported by some existing...
Combined effects of sample parameters on polymer charging due to electron irradiation are explored by a novel approach of contour in parallel computing. Transient processes of negative charging of a Kapton film sample irradiated by 10keV electrons are simulated with a simultaneous scattering-transport model and the existing experimental secondary electron current. As a function of sample thickness...
We report on the surface potential characteristics in the equilibrium state of the grounded insulating thin films of several 100nm thickness negatively charged by a low-energy (<5keV) focused electron beam, which have been simulated with a newly developed two-dimensional self-consistent model incorporating electron scattering, charge transport and charge trapping. The obtained space charge is positive...
Space charge and surface potential profiles are investigated with numerical simulation for dielectric films of SiO 2 positively charged by a focused electron beam. By combining the Monte Carlo method and the finite difference method, the simulation is preformed with a newly developed comprehensive two-dimensional model including electron scattering, charge transport and trapping. Results show...
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