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A 1.5Mpixel RGBZ image sensor that simultaneously captures color (RGB) and time-of-flight (ToF) range (Z) images is presented. While ToF sensors are well documented [1,2], few, if any, monolithic sensors have been reported that capture both range and color. In one sensor [3], a combined pixel structure captures color and range, but presumably in sequential fields. This approach does not allow simultaneous...
Vertical Gate NAND (VG-NAND) Flash array with multi-active layers has been successfully integrated for the first time. VG-NAND confirmed stable operations of program, body erase, and read. There is no aggravation on program disturbance with increased number of layers due to an architecture of VG-NAND with vertical blocks.
Multi-bit vertical structure NAND (VsNAND) flash memories with 32-paired FinFET cell string have been successfully integrated for the first time. Its array integration issues regarding the sub-10 nm vertical structure fin could be solved by proper choices of isolation material, ion implantation, and word line patterning. VsNAND flash array cells with TANOS (TaN/Al2O3/SiN/SiOx/Si) charge trap structure...
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