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Halbach PM ironless linear motors mostly adopt film windings. In this paper, a novel Halbach PM ironless linear motor with trapezoid windings is proposed and analyzed. The trapezoid windings can achieve a primarily single-sided and well sinusoidal magnetic field. After current density formula is derived, the magnetic flux density equations of the trapezoid windings are formulated using the vector...
In this paper, different types of planar permanent magnet array are studied by FEM, calculation and experiment. Then a variety of characteristic graphs are presented, conclusions obtained by analyzing these graphs will enable us to learn the arrays comprehensively and systematically. Starting with the standard Halbach array, then the effects of magnets size, Segment Numbers Per Pole, Magnet Shapes...
There is tight electromagnetic and mechanical coupling among planar motor (PM) 6- degree of freedom (DOF) motions for photolithography in semiconductor manufacturing. For the purpose of achieving decoupled control of the 6-DOF motions, this paper presents the current-controlled model of linear motor (LM) as the actuators, the concept of the actuator forces and the modal forces, and the decoupled dynamics...
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