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The cantilever based devices relying on optical beam steering, even though sensitive as sensors, have rather limited penetration to the market. The obstacle that has prevented so far the wider spread of such devices is the inability to monolithically integrate the photonic components on the same die with the cantilever. In this work, a novel microsystem is presented comprising integrated Si light...
In the present work a novel semiconductor metal-oxide (MOX) gas sensor is developed by means of lithographic techniques. The basic idea is to replace the continuous sensing film of standard MOX sensors with a pattern of wires in the sub-micron scale. Two approaches are followed: a plain lift-off process and a substrate patterning process. This work presents a comparison of the results of the two processes...
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