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We report a 3-channel ASIC for M&NEMS coriolis vibratory gyroscopes. Key element of each analog frontend (AFE) channel is a closed-loop interface amplifier with current reuse for the biasing of the piezoresistive nanogauge sensor detection. The outputs of the 3-channels are multiplexed to a single band-pass sigma delta modulator for on-chip analog to digital conversion. The fabricated ASIC achieves...
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