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This paper presents the design, fabrication and characterization of a femto-farad capacitive sensor, intended for pico-liter liquid measurements in microfluidic channels. The sensor has vertical silicon electrodes integrated into a through-wafer channel to measure the liquid level variations in the channel. An equivalent electrical model is developed to analyze the sensor's behavior. A six-mask, IC-compatible...
An fF-level capacitive sensor, intended for pL liquid measurements, has been fabricated with MEMS technology and successfully characterized. The sensor measures liquid level variations in a microfluidic channel. The sensor’s capacitance varies from 1.5 fF (channel empty) to 12.8fF (channel filled with 63 pL of water). To reliably detect such small capacitance changes, a low noise measurement system,...
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