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Corona poling is an interesting non-contact poling process for ferroelectric materials which, has in the past, been extensively applied to ferroelectric polymers, but not to other types of ferroelectric materials. Here, it has been investigated as an alternative technique to the conventional direct-contact poling of ferroelectric thin films.Contact-poling and corona poling techniques were applied...
Pb(Zr 0.3 Ti 0.7 )O 3 (PZT) thin films are of major interest in micro-electro-mechanical systems for their ability to provide electro-mechanical coupling and pyroelectric coupling. In this work, dense, crack-free PZT thin films have been obtained on silicon substrates up to a thickness of 3 μm. Piezoelectric coefficients d 33,f and e 31,f of sol–gel processed...
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