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In keeping with consumer preferences for ever more high-performance products, a requirement exists for precise autofocusing microscope systems for the inspection processes in mass production lines. Accordingly, a precise autofocusing microscope is proposed based on the reduction of the geometrical fluctuations of a laser light source, in which, the geometrical fluctuations of the laser light source...
In keeping with consumer preferences for ever more high-performance products, a requirement exists for precise and fast auto-focusing microscope systems for the inspection processes in mass production lines. Accordingly, the present study proposes a precise and fast laser-based auto-focusing microscope system in which an auto-focusing capability is achieved by using a position feedback signal from...
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