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The mapping capability of multichannel spectro-scopic ellipsometry (SE) has been demonstrated with examples from hydrogenated amorphous silicon (a-Si:H) and CdTe thin film photovoltaics (PV) technologies on glass. Maps as large as 40 × 80 cm2 have been obtained. For a-Si:H, maps of the bulk i-layer thickness and band gap as well as surface roughness layer thickness have been determined. For CdTe,...
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