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Residual compressive stress of Pb(Zr0.52Ti0.48)O3 thick films was investigated using residual strains derived from X-ray diffraction patterns. Sin2ψ method was applied for the 5, 10 and 15 µm sol-gel derived thick films annealed at 700°C for 1 hr as high frequency structural health monitoring square-shape transducers of 10×10 mm, deposited onto the curved nickel-based super alloy substrates. A...
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