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Integrating machine vision and motion control method into a double layers alignment system is a popular issue in flat panel display and semiconductor industry. An ultra-low stage is considered to compensate the posture between the upper and nether misalignment. Classic template matching is introduced in this paper to recognize the fiducial marks in this proposed alignment system. The compensate variables...
The parallel robots have attracted many researchers¡¦ attention for its great potential in high speed pick-and-place operation. In this paper, a short description about the development and construction of parallel robot in Metal Industries Research and Development Centre, Taiwan, is introduced. A concept for the development is depicted as well as the kinematics. An embedded system utilized to control...
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