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Product engineering for microsystems or MEMS (micro-electromechanical system) devices comprises the design of the structure as well as the definition of its manufacturing process flow. The approach is characterized by application specific fabrication flows, i.e. fabrication processes (built up by a large variety of process steps and materials) depending on the later product. Customer-tailored functions...
Product engineering of micro and nano technology (MNT) devices differs substantially from product engineering in more traditional industries. The general approach is mostly bottom up, as it centers around the available fabrication techniques. The strong emphasis on manufacturing technology in this area leads to a large number of application specific fabrication processes. In the first part of this...
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