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This paper presents a highly sensitive tactile sensing array. Sensing elements of the array comprise multiwall carbon nanotubes and polydimethylsiloxane polymer. A novel lithography process is proposed for fabricating an SU-8 mold for shaping the sensing cells in the array. In addition, a nylon membrane filter is proposed to serve as a mold for numerous microdome patterns, which were transferred onto...
In this work, a highly-sensitive tactile sensor array using the tunneling piezoresistive effect is presented. The sensing element, which is made of multi-wall carbon nanotubes and polydimethylsiloxane (MWCNT and PDMS) conductive polymer, was patterned with microdome structures by a novel fabrication process on a membrane filter substrate. The fabricated sensing device features advantages such as ultra-high...
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