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In this paper, we present the design, fabrication, and measurements of a lens THz antenna that can be fabricated using conventional photolithography and deep reactive etching processes. The antenna is composed of an extended hemispherical silicon lens and a leaky wave waveguide feed. Both elements are fabricated using silicon micromachining techniques, enabling the fabrication of future large antenna...
A set of antenna geometries for future integrated arrays at terahertz frequencies, based on two fabrication techniques is presented. The first technique consists in an advanced laser micro-fabrication, allowing fabricating advanced 3D geometries but may not be cost-efficient for large arrays. The second one is based in photolithographic processes, allowing the fabrication of arrays on a single wafer...
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