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Zn(O,S) thin films 27 – 100 nm thick were deposited on glass or Cu(InxGa1−x)Se2/Molybdenum/glass with RF sputtering, atomic layer deposition, and chemical bath deposition. The complex dielectric functions ε of these films were extracted by spectroscopic ellipsometry and transmission analyses. It is found that ε varies on a large scale, indicative of significant variations in the films' chemical and...
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