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Benefits of using TFT (thin film transistor) technology for integrated MEMS is discussed from view points of design rule, device dimension, output voltage, and post-process. TFT-MEMS for biochemical and optical applications are presented.
We present the usage of an optically transparent Thin Film Transistor (TFT) electrode array to perform arbitrarily spatially confined electrical characterizations of a cell culture. These arrays are a mature technology commonly used in Liquid Crystal Displays, and manufacturable on a scale of up to square meters. Electrical characterization allows one to detect not only changes of concentration of...
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