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Benefits of using TFT (thin film transistor) technology for integrated MEMS is discussed from view points of design rule, device dimension, output voltage, and post-process. TFT-MEMS for biochemical and optical applications are presented.
We report a multi-physics simulation and layout design technique for integrated-MEMS (microelectromechanical systems) based on an electrical circuit simulator. A solver for the mechanical equation of motion has been programmed in a Verilog-A compatible HDL (hardware description language) within the Cadence Virtuoso environment to attain new designing capabilities including automatic mask layout synthesis,...
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