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A new design of complementary metal–oxide–semiconductor microelectromechanical systems (CMOS-MEMS) broadband infrared (IR) emitter arrays with integrated metamaterial absorbers (MAs) developed by the CMOS back-end-of-line is presented. The IR emitter array is a promising broadband thermal radiation source for integrated gas sensors. Novel IR emitter arrays are designed using the Central Semiconductor...
This paper presents a new design of complementary metal-oxide-semiconductor-microelectromechanical systems (CMOS-MEMS) infrared emitter arrays integrated with metamaterial absorbers (MA). The infrared emitter array is a key IR thermal radiation source for gas sensors. The IR emitter arrays are implemented using the standard CSMC 0.5 µm 2P3M CMOS process. Three different shape of micro emitters are...
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