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Surface biofunctionalization of capacitive micromachined ultrasonic transducer (CMUT) based sensor can develop non-informative stress and elasticity, which are distorting sensor readings related with the mass of established immune complex. The prototype sensor calibration function, using polimethylmetacrylate (PMMA) films from 7 to 100 nm, was developed to relate the sensor readings with the changing...
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