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The array of the CMUT sensors was fabricated by the direct bonding of the silicon membranes provided as a device layer of the SOI wafer with the oxidized and pre-patterned highly doped silicon wafer. The active surface of the sensors was coated with thin gold film. We demonstrate the detection of the formed immune complex over the CMUT surface modified by the bovine leukemia virus antigen BLV gp51...
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