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A ZnO guiding layer with nanorod arrays grown on a 90°-rotated ST-cut (42°45) quartz substrate was used to fabricate a Love wave fluid sensor. ZnO nanorod arrays synthesized on the guiding layer enhance the sensitivity of the flow rate. ZnO thin films were deposited by radio frequency magnetron sputtering and ZnO nanorod arrays were then synthesized on the thin films via the hydrothermal method. The...
This study enhances the ultraviolet sensitivity of Love wave photodetector using a novel application of ZnO nanorods. The Love wave photodetector was fabricated using a ZnO guiding layer with nanorod arrays deposited on a 90°-rotated ST-cut (42°45′) quartz substrate. Dense crystalline ZnO thin films were deposited by radio frequency magnetron sputtering. The ZnO nanorod arrays were synthesized on...
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