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Multi-layer piezoelectric thin-film substrates which may have the properties of good temperature characteristic, high reflectivity, high coupling coefficient, high phase velocity, and integratible with semiconductor, have the potential to be used on acoustic devices. The properties of piezoelectric thin-film substrates are determined by the structures of the substrates, piezoelectric material, the...
Surface acoustic wave (SAW) devices are of great interest for chemical and biochemical sensing applications. As the new piezoelectric materials are produced and the development of SAW device substrates expands from single-layer to multi-layer, analyzing the properties of piezoelectric substrates becomes more and more difficult. In this paper, a method that applies finite element (FEM) simulator to...
The coupling-of-modes (COM) theory has been widely used in simulation of surface acoustic wave devices. The accuracy of simulation strongly depends on accurate COM parameters of the piezoelectric substrate. The COM parameters of most single crystal piezoelectric substrates can be obtained in literatures. However, for thin film and multilayer substrate, the COM parameters are often not accessible....
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