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Recently, Si technology has been searching for ways to develop Si-driven future electronics by overcoming the limitations in its electrical and optical properties through more Moore (MM), morethan- Moore (MtM), and beyond complementary metal-oxide-semiconductor (CMOS) approaches. Among the suggested strategies, III-V-on-Si heterogeneous integration can be a solution that allows the merger of III-V-based...
In this work, in order to investigate the effects of annealing gases on the quality of Ge epitaxially grown on Si substrate, ex-situ rapid thermal annealing (RTA) processes with different gases have been performed. The Ge-on-Si samples were prepared by different growth techniques using reduced-pressure chemical vapor deposition (RPCVD), and then, samples annealed in the N2, forming gas (FG), and O...
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