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Wafer-scale nano-mushroom sensor was demonstrated with the refractive index sensitivity of 373 nm/RIU, resulting in significant color shift detectable by eye. It also works for surface-enhanced Raman spectroscopy with the enhancement factor of 107.
Black silicon with slanted nanopillar array on planar and microstructure was produced for surface-enhanced Raman spectroscopy (SERS). The angle dependence of etching angle and nanopillar slanted angle was investigated with scanning electron microscopy.
This paper presents the forming mechanism of fine line (less than 50 mum) in manufacture of packaging substrate. Both subtractive and semi-additive lamination processes were applied for finer pitch substrate manufacture. In addition, signal integrity of the finer traces made on different types of material was tested. Based on these studies, design guidance of fabrication process, materials selection...
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