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This paper presents the design, fabrication and evaluation of a novel ring-shape MEMS micro actuator for a latching mechanism for low power consumption and large displacement linear actuation, which can be applicable for a variable-focus lens system such as an accommodative intraocular lens (AIOL). The proposed actuator consists of a shape-memory-alloy (SMA) ring, parylene spring and shoes. The parylene...
This paper reports a novel ring-shape micro actuator for a latching mechanism used in a low power consumption and large displacement micro linear actuation. The proposed actuator consists of a shape memory alloy (SMA) ring, parylene spring and shoes. The parylene spring was carefully designed for independent control of radial and axial stiffness, which can be realized by a high aspect ratio cross...
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